Commercialization of Innovative MEMS-based SiliconUltrasound? Technology for Medical Diagnostic Imaging

摘要

Sensant's MEMS-based Silicon Ultrasound? technology is a platform on which therncompany is building a new, more powerful generation of medical ultrasound imagingrnprobes and systems. At the core of the Silicon Ultrasound? technology are Sensant'srnCapacitive Microfabricated Ultrasonic Transducers (cMUT), built on the surface of arnsilicon wafer. Resembling tiny silicon drums, these sensors transmit and receive highfrequencyrnsound waves for applications in medical ultrasound imaging.rnThese new MEMS transducers have better performance and more degrees of designrnfreedom than the traditional piezoelectric transducers (PZT). Compared to PZT probes,rnthe broadband frequency response allows for more information to be used in imagernformation and thus significantly improves image quality (tissue contrast, resolution,rncontrast agent imaging, etc.). Further, while PZT elements must be machinedrnindividually from bulk material and then connected to controlling electronics, thernsemiconductor technology by which cMUT probes are manufactured enables the acousticrnsensors and intelligent CMOS electronics to be monolithically integrated.rnSensant has received its first product order for ultrasound imaging probes, subject tornmeeting quality and regulatory specifications, and plans to release product in the latterrnhalf of 2005.rnSensant has leveraged multiple and diverse relationships to successfully develop andrncommercialize this innovative MEMS technology for medical diagnostic ultrasoundrnimaging applications.