Commercialization of Direct LIGA - Challenges andOpportunities

摘要

Since the early 1990s a variety of applications ranging from precision metallic, ceramic,rnor polymeric parts to complex devices for micro-fluidic and micro-optic applicationsrnhave been discussed with the assumption that LIGA can either make a significantrncontribution or is the sole technology able to make these products. The question today is,rnhave individual LIGA groups or even the entire LIGA Community achieved this goal?rnDespite major investments, a lot of hard work from many students and researchers, andrnsome promising "prototypes," a true mass product made by direct-LIGA, I.e., using x-rayrnlithography and electroplating, has still not entered the market. This paper will brieflyrnpresent the current status of direct-LIGA technology and discuss some examples ofrncommercialization efforts as well as prospects for high-volume production.