MEMS Fabrication: High-Volumein a Low-Volume World1

摘要

Funding of Micro Electromechanical Systems (MEMS) research at the DefensernAdvanced Research Projects Agency (DARPA) is entering its second decade. DARPAfundedrnresearch has resulted in series of convincing technical demonstrations for a widernrange of applications, and has contributed to a general consensus that for mechanicalrndevices "smaller is better". However, many of those attempting to capitalize on MEMS'rnadvantages have experienced longer development times and higher development costsrnthan they anticipated. This difficulty results in large part from MEMS' application ofrnmass-production semiconductor fabrication technology to low-wafer-volume MEMSrnmarkets. One option for overcoming these difficulties would be to develop newrnfabrication technologies better suited to observed MEMS markets. Such technologies