A Novel Approach Towards Standardization of MEMSProcess Development

摘要

The design support for future process technologies in MEMS will have to take thernprocess related issues much more into account compared with conventional EDArntools. Up until now most design tools still use the strict interface to the processrntechnology provided by design rules and technology files as introduced by designrnmethodologies some 20 years ago (e.g. Mead & Conway, Y-chart etc.).rnThis paper proposes a novel approach. Based on a concurrent design methodology, arnprocess management and development system is introduced, which allows thernspecification of processes for specific applications and allows the tracking andrnevaluation of the development procedures. This process management environmentrnhandles the missing link in EDA tool support for the interface between process datarnissues and design data and enables building up a reusable, central repository forrnMEMS processing knowledge.