Business opportunities for poly-SiGe as post-CMOSMEMS integration technology

摘要

This paper discusses the use of poly-SiGe as a post-CMOS MEMS integrationrntechnology. Using this technology, MEMS devices may be processed directly on top ofrnactive CMOS yielding significantly miniaturized systems with increased sensitivity andrnreduced cost. We indicate that this technology has certainly very interesting businessrnopportunities for fast growing markets like ambient intelligence applications, games,rnwireless, displays, ...