首页> 外文会议>9th International conference on commercialization of micro and nano systems (COMS 2004) >Multidisciplinary Nanotechnology / MEMS Facilities for RD– Trends, Challenges and Lessons Learned

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Multidisciplinary Nanotechnology / MEMS Facilities for RD– Trends, Challenges and Lessons Learned

机译：用于研发的多学科纳米技术/ MEMS设施–趋势，挑战和经验教训

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《9th International conference on commercialization of micro and nano systems (COMS 2004)》|2004年|311-312|共2页
会议地点 Edmonton(CA);Edmonton(CA)
作者
Steven J. Riojas;
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作者单位

AIA, LEED? Emerging Technologies M+W Zander U.S. Operations, Inc.;

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原文格式 PDF
正文语种 eng
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