Optimum Design for a Micromanipulation End-effector Based on Flexure Hinge

摘要

Micro-Electro-Mechanical-Systems (MEMS) have been widely researched with the development of micro sensors, micro actuators and micro components. However, the common fabrication methods for MEMS are based on the photolithography and other 2-D techniques. Although LIGA technique and bulk machining made it possible to fabricate 3-D components, it is still difficult to assembly these components into a complex system. Micromanipulation is an important way to assembly and test MEMS. As an unit of the micromanipulation system to manipulate micro components directly, an end-effector must character high precision, quick response and fine linearity. This paper proposes a novel scheme end-effector based on the flexure hinge driven by the piezoelectric (PZT) actuator. The paper utilizes the optimum method in Finite Element Analysis (FEA) to optimize the design the end-effector. It satisfies various constraints and improves the system performance. The performance of the end-effector is analyzed by the simple method and finite element method. Enhancing the rigidity of the pivot and the arms of the flexure-hinges is effective way to improve the motion magnification.