A New Optimize Design Method of Microelectromechanical Accelerometer

摘要

At present, the microelectromechanical accelerometer design, whether using the traditional Bottom-up method or current Top-down method, to obtain the appropriate geometry parameter, large numbers of simulation must be done, which will make the design cycle longer and design cost higher. In this paper, a new optimize design method is given to solving these problems, and the design of four-beams piezoresistive accelerometer as an example illustrates the design flow from a system description. After defining the design variable, design constraint and objective function, to obtain the optimizing solution, the software LINGO of non-linear programming is used.