The Application of MEMS Sensors in Dynamic Testing

摘要

The problem of large-overload and low-range sensors in dynamic testing field has not been solved completely. Because of the piezoelectric sensors' common inhere defect in technology and structure, accumulation or leakage of charge will appear and thus result in the drift of the sensors' output when they suffered large overload drive. This phenomenon results in the tested signal not to return zero. Thus, some tested data in large overload environment cannot reappear the dynamic process. The MEMS sensors provide an effective way to solve the problem. This paper discusses the principle of the MEMS sensors and emphasizes on the application of MEMS Sensors in large-overload and low-range Testing.