The development and potential application fields of micropump

摘要

s Micropump is one of the earliest emerged devices of MEMS components. An astonishing diversity of micropump concepts and devices has emerged until today, reaching from micropump with check valve to valve-less micropump- almost every MEMS-based or macroscopic actuation principle has been combined with micropump. Keeping commercialisation in mind, it is worth to summarize and also take a look into the potential application of mciropump.