Bulk Micromachined Resonant Accelerometer

摘要

This paper presents a novel design of silicon micromachined resonant accelerometer, in which double-ended tuning forks (DETFs) are implemented. Each fork serves as a stress-sensitive resonator. If an external acceleration is applied, the inertial force generated by the proof mass would impose on the fork axially through the cantilever, and there would be a shift in the fork's natural frequency. Electrostatic combs are mounted on the tines for driving and sensing the fork's resonant frequency. This sensor can be fabricated in bulk micromachined process, and its sensitivity is about 2Hz/g by finite element method.