Equilibrium N_2-CO Gas Compsoition Coexisting with AlN-Al_2O_3-Graphite Measured by Quadrupole Mass Spectrometry

摘要

The equilibrium N_2-CO gas compositions coexisting with AlN-Al_2O_3-graphite have been measured by quadrupole mass spectrometry for establishing the experimental method to determine the high-temperature recation equilibria in the AlN-Al_2O_3 system. From the obtained results, the standard Gibbs energy changes of the following raction is determined at temperatures ranging from 1750 to 1900 K, Al_2O_3C(s)+N_2(g)=2AlN(s)+SCO(g), triangle openG~o/kJ=715.8-0.3548T. Based on the above result, the standard Gibbs energy of formation of AlN is also evaluated as, triangle openG_f~o(AlN)/kJ=-313.7+0.1149 T.