Software and Control System of the PTB nanometer length comparator

摘要

The PTB nanometer length comparator was developed to be used as an universal measurement machine for one dimensional calibrations of photomasks, line scales, linear encoders, laser interferometers and long range probes. The software design must be flexible enough to handle different measurement objects and localisation sensors and complete measurement systems as supplied by customers. The nanometer comparator is an attempt to improve a very high precision mechanical system by additional measurement and software based control techniques.