Modelling and Control of the Multi-axis Nanopositioner using Inertial Slider/Walking Method

摘要

Nanopositioner using inertial principle is presented. The mass-spring model is used to describe the nanopositioner which is composed of moving body, steel rods and tube PZTs. Experimental result is presented and it shows sinusoidal response, therefore second order model can be used. The three dimensional model has four mass components and six spring components. The damping effect can be adopted by experimentally determined damping parameter. Eventually the nanopositioner will be closed loop controlled using interferometer sensor.