Optimal Design of XYθ precision positioning stage - maximizing the system bandwidth

摘要

As an approach to the precision stage, there is one servo system that can move long range and fine range with one actuator. The simple easy VCM(Voice Coil Motor) type one servo system is proposed in this study. It is designed to meet long stroke and fine motion specification simultaneously. There has been no trial of optimal design in the point of designing precision positioning stage. When the system is working, there are disturbances and unwanted vibration around the system. System must have wide bandwidth enough to reject disturbances and to have fast working rate. Therefore, in this study, bandwidth is chosen as cost function of optimal design. The designed system can be applied to the precision position stage like the wafer aligner and lithography stepper.