Calibration aspects of a measurement system for an ultra-stiff nanopositioning system

摘要

This paper describes the calibration of the measuring system of a rigid positioning system with high resolution based on piezostepper technology. The measuring system measures all six degrees of freedom of the position of the stage with respect to an independent reference frame. This enables the drive system to correct the drive co-ordinates as well as the bearing co-ordinates. This reference is a true metrological reference in the sense that is independent suspended from either the world or the tool. The accuracy of calibration is estimated to be within 100 nm.