The study deals with the creation of ultraprecision microgrooves using non-rotational V-shaped diamond tools mounted on ultraprecision machining center. It is experimentally found that the adequate cutting condition for V-shaped diamond tool rake angle is 0 degree and that the cutting speed is 40 mm/min with dripped kerosene as a cutting fluid. Using the above cutting condition, parallel, crossed and curved V-shaped microgrooves were machined respectively. As a result, fine microgrooves without burrs are obtained, which are applicable to micro optical devices.
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