Investigation of Single Asperity Microcutting Using an Atomic Force Microscope

摘要

Based on the geometrical features of the AFM (Atomic Force Microscope) diamond tip as well as the interaction existed between the diamond tip and the machined material, a theoretical model regarding single asperity cutting has been put forward. The experiments were conducted on various materials including Al-alloy, single crystal germanium and silicon with different normal loads and cutting speed. On the basis of the theoretical analysis verified with the experimental results, a study of cutting process on nano-scale in terms of cutting force and the material removal mechanism was conducted.