Hybrid Vibration Control of Slide carriage of Ultraprecision Machine Tool

摘要

Vibration is one of the key factors affecting the machining quality in precision and Ultraprecision machining. This paper discusses a hybrid vibration control method for slide carriage by using the merits of both neural network control and PID control. To carry out transverse vibration control in the process of slide carriage movement, active air-actuator based on air bearing and PZT is developed. The experimental results show the effectiveness of NN-PID control in the slide carriage system.