The design of a high precision tracking controller used in ultra-precision machine

摘要

The ultra-precision machining requires high resolution. The affect of nonlinear factors and the problem of stability are two major factors that to be faced in the designing of the ultra-precision controller because of high motion resolution & accuracy. The design of machine motion controller is become very important in ultra-precision machining. A ball-screw driven carriage with a resolution of 5 nm is researched, and a controller named gain self-turning based on motion error (GSTBE) is proposed. It is proved that GSTBE controller is more stable than traditional PID controller. And the controller also appears to have higher tracking accuracy in micro and macro motion scope.