Construction and control of an ultra-stiff nanopositioning system

摘要

This paper describes the design and manufacturing of a rigid positioning system with high resolution based on piezostepper technology. The planar piezostepper is able to move along the three in-plane directions and is able to make small correction movements in the out-of-plane directions. The piezostepper integrates the drive system, the transmission, and the bearing system into a single stepping unit. This leads to a unique combination that combines high positioning accuracy with high bearing stiffness, obtained by active control. The position deviation of the stage under influence of the disturbance forces of an ELID process proves to lie within 20 nm.