A SensorizedμElectro Discharge Machined Superelastic Alloy Microgripper For Micromanipulation

摘要

This paper describes a novel microgripper, fabricated in superelastic alloy (Ni50.8Ti49.2) by wired micro Electro Discharge Machining (μEDM). The main features of the new microgripper (Figure 1) are the fabrication technology (μEDM) and the exploited material (superelastic alloy); the gripper was sensorized with commercial semiconductor strain-gauges and implemented in the force-feedback micromanipulation workstation developed in the authors' laboratory.