Precision Cutting of Micro None-Axi-Symmetric Aspherical Surface with 3-Axes Controlled Diamond Tool

摘要

This paper deals with a precision cutting (shaper) of micro none-axi-symmetric aspherical surface. Ultra-precision cutting (shaper) system of micro none-axi-symmetric aspherical surface was developed. In this system, a round shaped single crystal diamond tool was used and it was controlled 3-dimentionally with 1nm resolution by linear scale feedback system. In the cutting tests, the moulding dies of Ni-P alloy for multi array (fly eyes) lenses were examined.